CORPORATION

■ Move-Free Thin Wafer Mobile E-Chuck Carrier Supporter_4,6,8,12

▲SEMI-AUTO Wafer Bonder of Mobile E-Chuck Carrier Supporter_4,6,8,12-inch

▲FULL-AUTO Wafer Bonder of Mobile E-Chuck Carrier Supporter_4,6,8,12-inch

● Workable in Vacuum Environments

● Be able to adsorb Metal / Semiconductor / Glass / Paper / Porous materials

Patent Coulomb-Force E-Chuck has been developed long time and has dozens of international patents.

Developed by advanced technology to enclose electrical field in the E-Chuck. E-Chuck become as move-free carrier. After adhesion setting, Move-Free Supporter can move freely even disconnecting the power supply. Move-Free support can support hardness or shape reinforcements for thin fragile wafer or glass panel.

Patent Coulomb-Force E-Chuck has best characteristics than many electrostatic chucks under long-term advanced researches and developments. Patent Coulomb-Force E-Chuck is a ideal handling tool for soft and thin materials.

■ Main Applications

①Thin Wafers, Warp Wafers _4,6,8,12-inch

②PVD, CVD, Plasma ETCHER, ION Beam Trimming (IBT)

③3D IC Fabric Package, MCM, MCP, WLP, FOWLP, WoW, CoW, CoWoS, SoIC

④Flat Glass

⑤Micro-LED

⑥Soft Copper Foil

⑦Soft Film

⑧Vacuum Lamination for OLED or Touch Panel

⑨Shape Reinforcement Carrier (Eg, 4" Wafer-on-6" E-Chuck)

■ Thin Wafer Carrier Supporter

1. Developed by special technology to enclose electrical field in the E-Chuck.

2. Need connect controller for about 30 seconds to switch the adhesion state.

3. After adhesion setting, Cordless Move-Free Supporter can move freely even disconnecting the power supply.

4. Maximum operating temperature: 250 degrees centigrade.

5. Suitable for soft, thin and fragile object carriers. (Eg, thin wafer, thin glass panel, 4"wafer-on-6"chuck Shape Reinforcement Carrier, Wafer Transfer).

■ Main Products

①Micro Die Handling 100μｍ×200μｍ E-Chuck

②(Coreless Move-Free) Thin Wafer Mobile E-Chuck Carrier_4,6,8,12-inch

▲SEMI-AUTO Wafer Bonder of Mobile E-Chuck Carrier Supporter_4,6,8,12-inch

▲FULL-AUTO Wafer Bonder of Mobile E-Chuck Carrier Supporter_4,6,8,12-inch

③(Wired) Thin Wafer Robot Holder

④(Cordless) Battery Power Holder

⑤Thin Wafer Palm Holder

⑥Anti-wrinkle Foil Holder

⑦2D Curved Holder

⑧3D Curved Holder

⑨AOI Black Holder