■ Patent Coulomb-Force E-Chuck (Electrostatic Chuck)

● Workable in Vacuum Environments

● Be able to ​adsorb Metal / Semiconductor / Glass / Paper / Porous materials​ 

■ Operational Environments

(1) Atmospheric Pressure

(2) Vacuum Environment 

■ Product Features

(1) Coulomb-Force Electrostatic Chuck.

(2) Patent Coulomb-Force E-Chuck was developed long time and has dozens of international patents.

(3) Stable and uniform adhesion force is achieved by applying the voltage to the electrode 

(4) Apply lowest voltage to keep maximum adhesion force.

(5) Because voltage potential of object backside is zero, adhesion will not affect the backside circuits.

(6) Be able to adhere various materials : metal / semiconductor / glass / paper / porous materials.

(7) Work normally in a vacuum environments and general atmospheric environments.

(8) Can define adhesion area and non-adhesion area. Non-adhesion area can define other functions.

(9) Can be made by different substrates. Such as stainless, aluminum, ceramic, semiconductor wafer or glass. 

(10) Can be customized into various sizes and thicknesses for customer's applications.

(11) Advanced technology enclose electrical field in the E-Chuck. E-Chuck become as move-free carrier.

(12) After adhesion setting, Move-Free Supporter can move freely even disconnecting the power supply. Move-Free support can support hardness or shape reinforcements for thin wafer or glass panel. 

​■ Main Applications 

​​①Thin Wafers, Warp Wafers _4,6,8,12-inch

②PVD, CVD, Plasma ETCHER, ION Beam Trimming (IBT)

③3D IC Fabric Package, MCM, MCP, WLP, FOWLP, WoW, CoW, CoWoS, SoIC

④Flat Glass

⑤Micro-LED

⑥Soft Copper Foil

⑦Soft Film

⑧Vacuum Lamination for OLED or Touch Panel

⑨Shape Reinforcement Carrier (Eg, 4" Wafer-on-6" E-Chuck) 

■ Main Products

①Micro Die Handling 100μｍ×200μｍ E-Chuck

②(Coreless Move-Free) Thin Wafer Mobile E-Chuck Carrier_4,6,8,12-inch

  ▲SEMI-AUTO Wafer Bonder of Mobile E-Chuck Carrier Supporter​_4,6,8,12-inch

  ▲FULL-AUTO Wafer Bonder of Mobile E-Chuck Carrier Supporter​_4,6,8,12-inch

③(Wired) Thin Wafer Robot Holder

④(Cordless) ​Battery Power Holder 

 ⑤Thin Wafer Palm Holder

 ⑥Anti-wrinkle Foil Holder

 ⑦2D Curved Holder

 ⑧3D Curved Holder

 ⑨AOI Black Holder

​ ⑩Huge Stitching Holder

​ ⑪Other Custom E-Chucks 

■ Comparisons with other suckers

■ Product Videos